Model:ASM AD860 System Cabability XY placement:±1.5 mil(±38.10μm) Die rotation:±3°C cycle time:200 ms material handling capability Die size:6 mil x 6 mil – 50 mil x 50 mil(with PR look ahead) 6 mil x 6 mil – 50 mil x 50 mil(Without PR look ahead) Substrate sizes:Max.(L×W)8" x 5" (203mm×127mm) Pin length:Max.1.42” (36mm) Bond Head System Collet:surface pick type Bond force:30 – 250 g Workholder System No. of Workholders:2 Travel range:8’’x 5’’( 203mm×127mm) the image recognition of system Black and white or the 256-level gray range of observation:0.2’’x 0.2’’ Wafer Handling Capabilities Wafer table:Max.travel range7’’x 7’’( 178mm×178mm) Foton ring outer diameter:6’’(152mm) Expanded wafer size:Max.4.7’’(119mm) |